FIB (Focused Ion Beam) 鑱氱劍闆㈠瓙鏉熸妧琛�(sh霉)鐐鸿姱鐗囩爺鐧�(f膩)鍜岃姱鐗囧埗閫犻亷绋嬫彁渚涗簡鑷抽棞(gu膩n)閲嶈鐨勮紨鍔╂敮鎾�銆傚畠鐨勫熀鏈師鐞嗘槸锛氶潨闆婚�忛彙鑱氱劍鐨勯珮鑳介噺閹甸洟瀛�, 缍�(j墨ng)楂樺闆诲牬(ch菐ng)鍔犻�熷悗鎾炴搳瑭︾墖琛ㄩ潰锛屽湪鐗瑰畾姘ｉ珨鍗�(xi茅)浣滀笅鐢�(ch菐n)鐢熷湒鍍忓苟绉婚櫎鎴栨矇娣�锛堥�ｆ帴锛夌墿璩�(zh矛)銆傝┎鎶�琛�(sh霉)寤ｆ硾鎳�(y墨ng)鐢ㄤ簬鎺╂ā淇銆侀浕璺慨鏀瑰拰澶辨晥鍒嗘瀽銆傜櫨闈堝▉寰炵編鍦婼TREM 鍏徃寮曢��(j矛n)FIB 娣卞堡寰矇绌嶉珮绱旀湁姗�(j墨)閲戝爆婧�锛屽搧绋锛屽寘瑁濆叏锛屽彲婊胯冻瀹㈡埗鐨勫悇绋渶姹�銆�
鈻� 鐢�(ch菐n)鍝佸垪琛�
| 鐢�(ch菐n)鍝佺法铏�(h脿o) |
閲戝爆娌夌⿳鐗� |
鐢�(ch菐n)鍝佸悕绋� |
鍖呰 |
| 78-1350 |
Pt |
锛堜笁鐢插熀锛夌敳鍩虹挵(hu谩n)鎴婁簩鐑熀閴�(IV)
(Trimethyl)methylcyclopentadienylplatinum(IV), 99% |
2 g
5 g |
| 98-4024 |
Pt |
(Trimethyl)methylcyclopentadienylplatinum(IV), 99%, 78-1350, contained in 50 mL
Swagelok® cylinder for CVD/ALD |
10 g |
| 74-2202 |
W |
鍏景鍩洪帰
Tungsten carbonyl, 99% (99.9+%-W) sublimed |
5 g
25 g |
| 98-4036 |
SiO2 |
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in 50 mL Swagelok® cylinder for CVD/ALD |
25 g |
| 79-1600 |
Au |
浜岀敳鍩猴紙涓夋盁涔欓叞涓欓叜锛夐噾(II)
Dimethyl(trifluoroacetylacetonate)gold(III), 98%(99.9%-Au) |
500 mg
2 g |
| 29-2928 |
Cu |
闆欙紙鍏盁涔欓叞涓欓叜锛夊悎閵�(II)
Copper(II) hexafluoroacetylacetonate, anhydrous, elec. gr. (99.99+%-Cu) PURATREM |
1 g
5 g |
鈻� 閰嶅鍒昏潟姘ｉ珨
| 鐢�(ch菐n)鍝佺法铏�(h脿o) |
鐢�(ch菐n)鍝佸悕绋� |
鍖呰 |
| 54-1500 |
浜屾盁鍖栨皺 Xenon(II) fluoride, 99.5% |
2 g
10 g |
鈥绘洿澶氱敘(ch菐n)鍝佽珛(q菒ng)鑱�(li谩n)绯诲鏈嶅瀭瑭紒