鐧鹃潏濞佺鎶�鏈夐檺鍏徃鍓�(chu脿ng)绔嬩簬1992 骞�锛屽绲備互“鐐虹鐮斿拰鐢熺敘(ch菐n)闋�(l菒ng)鍩熸彁渚涗笘鐣屼竴娴佺殑鎶�琛�(sh霉)鐢�(ch菐n)鍝佸拰涓栫晫涓�娴佺殑鏈嶅嫏(w霉)”鐐哄畻鏃�锛岃嚧鍔涗簬瓒呯簿绱板寲瀛�(xu茅)鍝佺殑鐮旂櫦(f膩)鑸囧埗閫犮�傜洰鍓�锛岀櫨闈堝▉宸插叿鍌欑偤鍖栧(xu茅)銆佸垎鏋�銆佺敓鐗�銆佹潗鏂�銆佺墿鐞嗗強钘ョ墿鐮旂櫦(f膩)绛夐牁(l菒ng)鍩熸彁渚涜繎50钀ó鐢�(ch菐n)鍝佸拰灏堟キ(y猫)鏈嶅嫏(w霉)鐨勮兘鍔�銆�
鍏変紡鐢�(ch菐n)妤�(y猫)涓�鐩存槸鐧鹃潏濞侀噸榛為棞(gu膩n)娉ㄧ爺绌剁殑鎶�琛�(sh霉)闋�(l菒ng)鍩�锛岀稉(j墨ng)閬庡骞寸殑鐧�(f膩)灞曪紝鐧鹃潏濞佸彲鎻愪緵杩�20绋珮绱旀埃楂旇垏2000浣欑ó鐮旂櫦(f膩)鍙婄敓鐢�(ch菐n)灏堢敤鍖栧(xu茅)鐢�(ch菐n)鍝�銆傚悓鏅傛牴鎿�(j霉)瀹㈡埗闇�姹傦紝閭勫彲閫茶涓嶅悓姣斾緥鍜岀磾搴︾殑娣峰悎姘ｉ珨瀹氬埗锛岀敘(ch菐n)鍝佺磾搴︽渶楂樺彲閬�7N锛�99.99999%锛夈�傜櫨闈堝▉鐨勯珮鍝佽唱(zh矛)鐢�(ch菐n)鍝佽垏灏堟キ(y猫)鎶�琛�(sh霉)锛屾寮曢牁(l菒ng)绁栧湅鍏変紡琛屾キ(y猫)杩呴�熺櫦(f膩)灞�銆�
鎺ㄨ枽鐢�(ch菐n)鍝�
|
鑻辨枃鍚嶇ū
|
TMB/Trimethylboron
|
BBr3/Boron Tribromide
|
DEZ/Diethylzinc
|
|
涓枃鍚嶇ū
|
涓夌敳鍩虹〖
|
涓夋捍鍖栫〖
|
浜屼箼鍩洪媴
|
|
CAS
|
|
|
|
|
鍒嗗瓙閲�
|
55.92
|
250.52
|
123.49
|
|
娌搁粸
|
-20.2鈩�
|
91鈩�
|
118鈩�
|
|
鐔旈粸
|
-161.5鈩�
|
-46鈩�
|
-28鈩�
|
|
瀵嗗害
|
2.3 g/L锛�21鈩冿級
|
2.7
|
1.2065
|
|
鍖呰瀹归噺
|
3.4 L/10 L/47 L
|
2.5 kg/鐡�
|
456 L/345 kg
|
|
鍖呰鏉愯唱(zh矛)
|
閲戝爆Mn
|
鐭宠嫳鎴栫〖纭呯幓鐠�
|
涓嶉姽閶�
|
|
绱斿害
|
锛�99.5% 鍙帴鍙楃壒娈婂畾鍒�
|
99.999 wt% as metals
|
99.98 wt% as metals
|
|
婵冨害
|
0.5%~5%姘埃娣峰悎鐗�
|
|
|
鏇村鐗圭ó姘ｉ珨鐢�(ch菐n)鍝佸強PECVD銆丄LD銆丆VD鍜孧OCVD婧�锛岃珛娲界櫨闈堝▉瀹㈡埗鏈嶅嫏(w霉)灏堝摗
鍏ㄥ鐢�(ch菐n)鍝�
|
鑻辨枃鍚嶇ū
|
涓枃鍚嶇ū
|
CAS
|
|
TMB /Trimethylboron
|
涓夌敳鍩虹〖
|
|
|
BBr3 /Boron Tribromide
|
涓夋捍鍖栫〖
|
|
|
Boron Trichloride
|
涓夋隘鍖栫〖
|
|
|
Boron Trifluoride
|
涓夋盁鍖栫〖
|
|
|
DMZn /dimethylzinc
|
浜岀敳鍩洪媴
|
|
|
DEZ /Diethylzinc
|
浜屼箼鍩洪媴
|
|
|
TMGa /Trimethylgallium
|
涓夌敳鍩洪幍
|
|
|
TEGa /Triethylgallium
|
涓変箼鍩洪幍
|
|
|
TMAl /Trimethylaluminium
|
涓夌敳鍩洪媮
|
|
|
Tmin /Trimethylindium
|
涓夌敳鍩洪姦
|
|
|
TiCl4 /Titanium Tetrachloride
|
鍥涙隘鍖栭垿
|
|
|
CP2Mg /Bis(cyclopentadienyl)magnesium
|
浜岃寕閹�
|
|
|
TDMAT /Tetrakis(dimethylamino)titanium
|
鍥�(浜岀敳姘ㄥ熀锛夎偨
|
|
|
Glass Etch
|
鐜荤拑铦曞埢鍔�
|
N/A
|
|
Hydrochloric Acid
|
姘寲姘�
|
|
|
Hydrofluoric Acid
|
姘熷寲姘�
|
|
|
Hydrogen Peroxide
|
閬庢哀鍖栨矮
|
|
|
Isopropyl Alcohol
|
鐣颁笝閱�
|
|
|
Nitric Acid
|
纭濋吀
|
|
|
Phosphoric Acid
|
纾烽吀
|
|
|
Water /HF
|
姘盁閰告按婧舵恫
|
|
|
Argon
|
姘埃
|
|
|
Helium
|
姘︽埃
|
|
|
Hydrogen
|
姘埃
|
|
|
Ammonia
|
姘ㄦ埃
|
|
|
Nitrogen
|
姘埃
|
|
|
Nitrous oxide
|
绗戞埃
|
|
|
Nitrogen trifluoride
|
涓夋盁鍖栨爱
|
|
|
Oxygen
|
姘ф埃
|
|
|
Phosphine
|
纾风兎
|
|
|
Phosphine Mix
|
纾风兎娣峰悎姘�
|
N/A
|
|
Silane
|
纭呯兎
|
|
|
Silane Mix
|
纭呯兎娣峰悎姘�
|
N/A
|
|
Silicon tetrachloride
|
鍥涙隘鍖栫
|
|
|
Silicon tetrafluoride
|
鍥涙盁鍖栫
|
|
|
Trichlorosilane
|
涓夋隘纭呯兎
|
|
|
Dichlorosilane
|
浜屾隘纭呯兎
|
|
闄勯寗锛氱敘(ch菐n)鍝佺磾搴﹀垎绱�
|
Grade
|
Purity
|
Total Impurities
|
|
7N
|
99.99999%
|
100 ppb
|
|
6N
|
99.9999%
|
1 ppm
|
|
5N5
|
99.9995%
|
5 ppm
|
|
5N
|
99.999%
|
10 ppm
|
|
4N5
|
99.995%
|
50 ppm
|
|
4N
|
99.99%
|
100 ppm
|
|
3N5
|
99.95%
|
500 ppm
|
|
3N
|
99.9%
|
1000 ppm
|